1. Metrology Quality Assurance: Oversee the performance and accuracy of critical inline metrology tools (including CDSEM, OCD, and Overlay) to ensure stable process measurement.
2. Tool Performance Matching: Develop, implement, and monitor calibration and cross-fab matching methods to guarantee uniform measurements across all metrology tools.
3. SPC System Enhancement: Drive the continuous improvement of SPC systems, including control limit setup, CPK monitoring, process audits, and data analysis.
4. Statistical Analysis & Risk Prevention: Apply advanced statistical methods (such as Design of Experiments (DOE), sampling plans, and reliability modeling) to predict risks and resolve quality issues.
5. Data-Driven Development: Program and develop custom statistical algorithms and analysis scripts to automate quality monitoring and defense reporting.
6. HQ Collaboration: Partner with engineering teams at our Taiwan headquarters to align local metrology and SPC standards with global best practices.